| Abstract [eng] |
In this work, the doped diamond-like carbon (DLC) films were deposited on Si (100) substrates by magnetron sputtering, where graphite and Ti targets were used. The Ti cathode current was changed from 0 A to 1.00 A. The target-substrate distance was fixed at 3 cm, the argon pressure in the deposition chamber was between 2-3 Pa, and the deposition duration was ~600 s. The surface morphology, adhesion, and friction of titanium doped diamond-like carbon films were investigated using Atomic Force Microscopy (AFM). Then the data were extracted and analyzed using Gwyddion software. The elemental composition of the films was also investigated using the energy dispersive X-Ray spectroscopy (EDS). Eventually, the structure of the films was investigated using Raman Spectroscopy (RS). Meanwhile, the light transmittance was measured using the IR-visible-UV spectrophotometer. The root mean square roughness values were slightly increased from ~1.2 to ~2.1 nm, and the Skewness and Kurtosis were decreased with the increase of Ti concentration. The results indicated that the surfaces of the films were self-affine shape. The increase of the Ti content in the DLC films resulted in a higher fraction of sp2 carbon sites and graphitization. The average adhesion values were decreased from ~14 to ~6 nN with an enhancement of Ti amount in the films. The friction forces measured using the sharp cantilever fluctuated (topography contribution). The DLC film with the lowest Ti concentration showed the lowest friction force value of ~14 nN at 80 nN normal force (friction coefficient µ ~0.175). The lateral deflection values measured using the “PMMA” cantilever, with the diameter of probe equals 1.5 µm, show much stability with the normal force variation between 20 and 100 nN. The lowest lateral deflection signal was obtained for the DLC film with ~23 at. % Ti. |
