| Title |
Plataus matavimo ruožo rezonansinio slėgio jutiklio sukūrimas ir tyrimas / |
| Translation of Title |
Wide range resonant pressure sensor fabrication and research. |
| Authors |
Barauskas, Dovydas |
| Full Text |
|
| Pages |
35 |
| Keywords [eng] |
capacitive micromachined ultrasound transducers ; resonant pressure sensors ; sensors. |
| Abstract [eng] |
Thesis carried out study of capacitive micromachined ultrasound transducers for wide range ambient pressure measurements development, design, fabrication and experimental research. Finite element model were created using SolidWorks and MatLab software to determine the parameters of the design. Fabrication process using micromachining and sacrificial release methods are described. Using these methods, resonant pressure sensor prototype were fabricated and fully assembled. To do measurements with the sensor special chamber and software were created for circuit analyzer Agilent 4395A, microcontroller STM32 and frequency meter Ч3-63 After the prototype performance analysis it was found that optimal operating point is achieved using 55-60 V. It was also determined that one of the sensor array sensitivity is not less than 240 Hz/kPa. |
| Dissertation Institution |
Kauno technologijos universitetas. |
| Type |
Master thesis |
| Language |
Lithuanian |
| Publication date |
2015 |
