Title Methylated poly(ethylene)imine modified capacitive micromachined ultrasonic transducer for measurements of CO2 and SO2 in their mixtures /
Authors Barauskas, Dovydas ; Pelenis, Donatas ; Vanagas, Gailius ; Viržonis, Darius ; Baltrušaitis, Jonas
DOI 10.3390/s19143236
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Is Part of Sensors.. Basel : MDPI. 2019, vol. 19, iss. 14, art. no. 3236, p. 1-20.. ISSN 1424-8220
Keywords [eng] CMUT ; CO2 ; SO2 ; gas sensing ; gravimetric detection ; methylated polyethyleneimine
Abstract [eng] A gravimetric gas detection device based on surface functionalized Capacitive Micromachined Ultrasound Transducers (CMUTs) was designed, fabricated and tested for detection of carbon dioxide (CO2) and sulfur dioxide (SO2) mixtures in nitrogen. The created measurement setup of continuous data collection, integrated with an in-situ Fourier Transform Infrared (FT-IR) spectroscopy, allows for better understanding of the mechanisms and molecular interactions with the sensing layer (methylated poly(ethylene)imine) and its need of surface functionalization for multiple gas detection. During experimentation with CO2 gases, weak molecular interactions were observed in spectroscopy data. Linear sensor response to frequency shift was observed with CO2 concentrations ranging from 0.16 vol % to 1 vol %. Moreover, the Raman and FT-IR spectroscopy data showed much stronger SO2 and the polymer interactions, molecules were bound by stronger forces and irreversibly changed the polymer film properties. However, the sensor change in resonance frequency in the tested region of 1 vol % to 5 vol % SO2 showed a linear response. This effect changed not only the device resonance frequency but also affected the magnitude of electroacoustic impedance which was used for differentiating the gas mixture of CO2, SO2, in dry N2.
Published Basel : MDPI
Type Journal article
Language English
Publication date 2019
CC license CC license description