| Title |
Numerical analysis of dynamic effects of a nonlinear vibro-impact process for enhancing the reliability of contact-type MEMS devices / |
| Authors |
Ostasevicius, Vytautas ; Gaidys, Rimvydas ; Dauksevicius, Rolanas |
| DOI |
10.3390/s91210201 |
| Full Text |
|
| Is Part of |
Sensors.. Basel : MDPI. 2009, vol. 9, iss. 12, p. 10201-10216.. ISSN 1424-8220 |
| Keywords [eng] |
MEMS ; vibro-impact ; contact ; finite element analysis ; nodal points ; vibration modes |
| Abstract [eng] |
This paper reports on numerical modeling and simulation of a generalized contact-type MEMS device having large potential in various micro-sensor/actuator applications, which are currently limited because of detrimental effects of the contact bounce phenomenon that is still not fully explained and requires comprehensive treatment. The proposed 2-D finite element model encompasses cantilever microstructures operating in a vacuum and impacting on a viscoelastic support. The presented numerical analysis focuses on the first three flexural vibration modes and their influence on dynamic characteristics. Simulation results demonstrate the possibility to use higher modes and their particular points for enhancing MEMS performance and reliability through reduction of vibro-impact process duration. |
| Published |
Basel : MDPI |
| Type |
Journal article |
| Language |
English |
| Publication date |
2009 |
| CC license |
|
