Title Creation and investigation of nanopositioning systems /
Another Title Nanopozicionavimo sistemų modeliavimas ir tyrimas.
Authors Limanauskas, L ; Nemčiauskas, K ; Lendraitis, V ; Mizarienė, V
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Is Part of Mechanika.. Kaunas : Technologija. 2008, Nr. 3, p. 62-65.. ISSN 1392-1207. eISSN 2029-6983
Abstract [eng] In the article the mathematical model of the developed nanoscanner is presented. The research results of static and dynamic precision integrating the experimental stand into LFM system are presented, too. Nanoscanner dynamics is expressed mathematically applying the Finite elements method. Theoretical and experimental resonant frequency of nanoscanner table is measured. Precision characteristics with error compensation block and without it are investigated experimentally. The investigation results are to be used in the field of nanolithography in order to enlarge the possibilities of transverse force microscope.
Published Kaunas : Technologija
Type Journal article
Language English
Publication date 2008
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