| Title |
Surface and structural analysis of carbon coatings produced by plasma jet CVD |
| Another Title |
Anglies dangų, sudarytų plazminiu metodu, paviršiaus ir struktūros tyrimas. |
| Authors |
Marcinauskas, Liutauras ; Grigonis, Alfonsas ; Valinčius, Vitas ; Valatkevičius, Pranas |
| Full Text |
|
| Is Part of |
Materials science = Medžiagotyra.. Kaunas : Technologija. 2007, vol. 13, no. 4, p. 269-272.. ISSN 1392-1320. eISSN 2029-7289 |
| Keywords [eng] |
Carbon coatings ; Plasma ; Acetylene ; Raman spectroscopy |
| Abstract [eng] |
Amorphous hydrogenated carbon films were deposited on Si (111) wafers from argon-acetylene gas mixture at atmospheric pressure by plasma jet chemical vapor deposition. The Ar / C2H2 gas volume ratio was 12 : 1, 60 : 1, and 100 : 1, while the distance between plasma torch nozzle exit and the samples was 0.01 m. Scanning electron microscopy analysis revealed that the growth rate and surface roughness of the coatings increases decreasing the Ar/C2H2 gas ratio. The Raman results show an increase of the sp3 bond fraction with decrease of the acetylene gas in argon plasma. The Fourier transform infrared (FTIR) spectroscopy indicated that the films permeability increases with decreasing Ar/C2H2 ratio. It revealed that the surfaces roughness, growth rate, bonding structure, and optical properties of the carbon coatings depend on the Ar / C2H2. |
| Published |
Kaunas : Technologija |
| Type |
Journal article |
| Language |
English |
| Publication date |
2007 |
| CC license |
|
