| Title |
Imprint lithography for large scale angular encoders |
| Another Title |
Įspaudimo litografijos taikymas kampinio judesio keitikliams. |
| Authors |
Grigaliūnas, Viktoras ; Tamulevičius, Sigitas ; Muehlberger, Michael ; Mittendorfer, Gerald ; Glinsner, Thomas ; Zakas, Gintautas ; Meškinis, Šarūnas ; Guobienė, Asta ; Palevičius, Arvydas ; Janušas, Giedrius |
| Full Text |
|
| Is Part of |
Materials science = Medžiagotyra.. Kaunas : Technologija. 2007, vol. 13, no. 2, p. 103-106.. ISSN 1392-1320. eISSN 2029-7289 |
| Keywords [eng] |
Nanoimprint lithography ; DLC films ; Glass scales and discs |
| Abstract [eng] |
This work presents experimental results of research directed toward production of large scale angular encoders using imprint lithography instead of conventional ultraviolet lithography. Testing of the different mould materials and ion beam deposited from hexamethyldisiloxane vapour and hydrogen gas mixture film like antisticking coating shows the best action of the SiOx doped diamond like carbon film coated mould to transfer features of the encoder. It was revealed, that linear dimensions of elements of the fabricated angular encoders differ from the master and it was shown that producing of large scale devices requires estimation of thermal behaviour of the used materials. Keywords: nanoimprint lithography, DLC films, glass scales and discs. |
| Published |
Kaunas : Technologija |
| Type |
Journal article |
| Language |
English |
| Publication date |
2007 |
| CC license |
|
