| Abstract [eng] |
High-precision positioning often plays the key role in many modern electromechanical and mechatronic devices and systems in a wide range of scale. Such fields as microscopy, metrology, precise machining, biomedicine, etc. significantly benefit from angular (rotary) positioning stages. Although resonant ultrasonic standing-wave motors have been widely explored so far as potential drivers for the rotary stages and positioners, they still face issues associated with insufficiently high precision, scalability, structural complexity, wear of contacting surfaces, and relatively high manufacturing costs. Research and development of an original piezoelectric rotary stage, which is driven by standing-wave vibrations of the piezocylinder (they ensure high-resolution bidirectional motion of the rotor), is presented in the dissertation. The influence of motion trajectories of three active contact zone elements of the piezocylinder on dynamic properties of the stage was numerically and xperimentally determined in this work. In order to evaluate vibro-impact interaction between the piezocylinder and rotor, lumped-parameter analytical model and distributed-parameter finite element model was developed. Dynamic characteristics of the stage, depending on the driving signal and applied external load, were experimentally investigated as well. When looking for an alternative to glass-chromium incremental scales, which are conventionally applied for ensuring precise angular positioning of piezoelectric stages, the novel polymeric incremental scales were fabricated and characterised in the thesis. |
