| Title |
A study of the influence of high-frequency excitation on the quality of microstructures replicated by thermal imprint technologies / |
| Translation of Title |
Aukštadažnių virpesių įtakos mikrostruktūrų, antrinamų terminio spaudimo metodais, kokybei tyrimas. |
| Authors |
Šakalys, Rokas |
| Full Text |
|
| Pages |
96 |
| Keywords [eng] |
thermal imprint ; high-frequency vibrations ; microstructure replication |
| Abstract [eng] |
The dissertation investigates the influence of high-frequency excitation on the quality of microstructures, which are replicated applying thermal imprint technologies. Master topologically complex microstructure for the thermal replication is designed applying computer generated holography and fabricated using electron beam lithography. Vibroactive pads, which enable to generate uniform displacement field throughout the operating surface, therefore, ensuring that all points of replicated microstructure are homogenously affected by vibrations, were designed and fabricated for thermal imprint process. Finite element model enabling to analyze pre-stressed devices was developed for determining the operating frequencies, subsequently results were experimentally verified. The influence of high-frequency assisted thermal imprint process parameters on the quality of replicated microstructure was determined experimentally. The developed technology enables to replicate microstructures whose quality is close to theoretically ideal. Moreover, ultrasonic hot embossing technology was applied for the replication of microstructures and the influence of additional heat generation through the pre-structured polymer layers on the process parameters and quality of microstructure was determined. |
| Dissertation Institution |
Kauno technologijos universitetas. |
| Type |
Doctoral thesis |
| Language |
English |
| Publication date |
2017 |
