Title Optical interferometry based methods for investigations of dynamical processes in microsystems /
Translation of Title Dinaminių procesų mikrosistemose tyrimas optinės interferometrijos metodais.
Authors Palevičius, Paulius
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Pages 95
Keywords [eng] MEMS ; interferometry ; CGH ; DVC
Abstract [eng] Optical interferometric techniques for identification, analysis and monitoring of microelectromechanical systems are developed in the dissertation. Methods for the interpretation of time-averaged holographic fringes produced by non-linear oscillations of microelectromechanical systems has been investigated in this work. Finite element model of a fixed-fixed beam, performing nonlinear oscillations, provides valuable insight into the motions of investigated systems. A reliable scheme is proposed for the construction of 2D map of fringe centerlines, since that can be the main source of errors and uncertainties in the quantitative interpretation of fringe based optical images in optical MEMS analysis. The developed algorithmic implementation and original line tracing methods make this scheme robust to noise and various distortions in the original optical image. Finally, an image hiding scheme based on computer generated holography and dynamic visual cryptography is proposed. The secret image is embedded into the stochastic geometric moiré cover image. Gerchberg-Saxton algorithm is used to produce phase data from the encrypted cover image and is directly incorporated into CGH that can be effectively applied for optical monitoring of MEMS components. .
Dissertation Institution Kauno technologijos universitetas.
Type Doctoral thesis
Language English
Publication date 2015