| Title |
Turbomolekulinio siurblio valdymo tyrimas / |
| Translation of Title |
Research of turbo molecular pump control. |
| Authors |
Dubra, Mindaugas |
| Full Text |
|
| Pages |
53 |
| Keywords [eng] |
management ; cleaner ; vacuum ; molecules |
| Abstract [eng] |
In work is reviewed the management methods, principles of operation. Tested and used Turbomolecular pump master's thesis. Relatively few opportunities for management options. Tested pump management, performance dependence on changing parameters, the inverter application and its programming algorithm described in the experimental scheme. |
| Dissertation Institution |
Kauno technologijos universitetas. |
| Type |
Master thesis |
| Language |
Lithuanian |
| Publication date |
2015 |
