Title Control system of the experimental research of deposition process in vacuum /
Another Title Vakuume vykstančių kondensacijos procesų eksperimentinio tyrimo valdymo sistema.
Another Title Система управления экспериментального исследования процессов конденсации в вакууме.
Authors Sinkevičius, V ; Viržonis, D ; Urbanavičiūtė, L ; Jukna, T
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Is Part of Elektronika ir elektrotechnika.. Kaunas : Technologija. 2007, Nr. 5, p. 7-10.. ISSN 1392-1215. eISSN 2029-5731
Keywords [eng] vacuum ; condensation ; evaporation
Abstract [eng] The control system for near-atomic thin films deposition is disclosed. The system is consisting of three parts: vapor pressure control, film conductivity control and stepwise coverage control. All three subsystems are explored experimentally and found to have the sufficient potential to give improved repeatability of deposition of near-atomic thin films. The results and conclusions from stepwise coverage experiments, followed by AFM and XPS analysis is presented as an evidence of direct relationship between the in-situ recorded voltage pattern and the film formation stages.
Published Kaunas : Technologija
Type Journal article
Language English
Publication date 2007
CC license CC license description