| Title |
Hydrophobic diamond like carbon film for surface micromachining / |
| Another Title |
Hidrofobinės deimanto tipo anglies plėvelės taikymas paviršiniam mikroformavimui. |
| Authors |
Lazauskas, Algirdas ; Grigaliūnas, Viktoras ; Meškinis, Šarūnas ; Kopustinskas, Vitoldas ; Guobienė, Asta ; Gudonytė, Angelė ; Andrulevičius, Mindaugas ; Tamulevičius, Tomas |
| Full Text |
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| Is Part of |
Medžiagotyra = Medžiagotyra.. Kaunas : Technologija. 2009, vol. 15, no. 3, p. 196-200.. ISSN 1392-1320. eISSN 2029-7289 |
| Keywords [eng] |
diamond like carbon (DLC) ; surface micromachining ; microelectromechanical (MEMS) switch ; stiction |
| Abstract [eng] |
SiOx doped diamond like carbon (DLC) film was applied as effective barrier for protecting microstructures against stiction during fabrication of surface micromachined electrostatically actuated microelectromechanical switch. Hydrophobic properties of the SiOx doped DLC film were determined using Zisman method (average critical surface tension 42.0 mN/m) and the average surface roughness was determined by atomic force microscope (Ra = 2.1 nm). The SiOx doped DLC film surface properties were compared with actual Si <100> and Au film surface properties under the same investigation procedures. The X-ray photoelectron spectroscopy (XPS) showed typical chemical structure of SiOx doped DLC film. High resolution scanning electron microscopy showed that microelectromechanical switch was successfully fabricated using SiOx doped DLC film, the defects caused by stiction phenomenon were not observed. |
| Published |
Kaunas : Technologija |
| Type |
Journal article |
| Language |
English |
| Publication date |
2009 |
| CC license |
|
