| Title |
Influence of emitted electrons on the method for direct measurement of condensate resistance / |
| Authors |
Jukna, T ; Sinkevicius, V ; Urbanaviciute, L |
| DOI |
10.5755/j01.eee.20.2.6379 |
| Full Text |
|
| Is Part of |
Elektronika ir elektrotechnika.. Kaunas : KTU. 2014, vol. 20, no. 2, p. 28-31.. ISSN 1392-1215. eISSN 2029-5731 |
| Keywords [eng] |
thin film devices ; vacuum technology ; electrical resistance measurement |
| Abstract [eng] |
Electrical resistance of the vacuum-deposited condensate has non-linear relation to the condensate film thickness. Therefore, there exists a need for experiments to study applicability of the non-invasive method for condensate resistance measurement and to identify parameters by measuring condensate resistance directly. By using two-point measurement probes, this study analyses the influence of electrons emitted in the process of evaporator electronic emission on the method for direct measurement of condensate resistance. |
| Published |
Kaunas : KTU |
| Type |
Journal article |
| Language |
English |
| Publication date |
2014 |
| CC license |
|
