Title Numerical investigation of dynamical properties of vibroactive pad during hot imprint process /
Authors Narijauskaitė, B ; Palevičius, A ; Janušas, G ; Šakalys, R
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Is Part of Journal of vibroengineering.. Kaunas : Vibroengineering. 2013, vol. 15, iss. 4, p. 1983-1990.. ISSN 1392-8716
Keywords [eng] vibroactive pad ; hot imprint process ; holography ; piezoceramic
Abstract [eng] The operating frequencies of the vibroactive pad used in order to improve the quality of replicas of complex microstructures during the mechanical hot imprint process, are numerically analyzed in this paper. It is known that piezoceramics (and in the same time all construction) change its dynamical properties under the action of mechanical load. It is necessary to investigate dynamical properties of vibroactive pad, in order to improve the quality of replicas when planning more detailed research and development in this field in the future. Experimentally there is no possibility to determine the frequency for the construction to be excited, in order to reach modes of forms, thus modeling of the process was performed. The created mathematical model of vibroactive pad was implemented by FEM using COMSOL Multiphysics software. The vibroactive pad’s numerical analysis was performed with and without the action of mechanical load, as well experimental verification of model was performed (for the validation of the model without load with experimental data).
Published Kaunas : Vibroengineering
Type Journal article
Language English
Publication date 2013
CC license CC license description