Title Structure, properties and applications of diamond like nanocomposite (SiO(x) containing DLC) films: a review /
Another Title Deimanto tipo anglies nanokompozicinių (SiOx turinčių deimanto tipo anglies) plėvelių struktūros, cheminės sudėties, savybių ir taikymo sričių apžvalga.
Authors Meškinis, Šarūnas ; Tamulevičienė, Asta
DOI 10.5755/j01.ms.17.4.770
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Is Part of Materials science = Medžiagotyra.. Kaunas : Technologija. 2011, vol. 17, no. 4, p. 358-370.. ISSN 1392-1320. eISSN 2029-7289
Keywords [eng] SiOx containing diamond like carbon ; diamond like nanocomposite films ; structure
Abstract [eng] The present article reviews current situation on SiOx containing diamond like carbon (diamond like nanocomposite) films. The overview of different deposition methods and reagents used is presented; chemical composition of different diamond like nanocomposite films is described. Different models of structure of diamond like nanocomposite films are considered. Mechanical, optical, electrical properties as well as surface energy of diamond like nanocomposite films produced by different methods are reviewed and discussed. The survey of different potential and industrial applications of diamond like nanocomposite films is presented.
Published Kaunas : Technologija
Type Journal article
Language English
Publication date 2011
CC license CC license description