| Title |
Micromachining of diamond-like carbon deposited by closed drift ion source for cantilevers and membranes |
| Another Title |
Gembės ir membranos pavidalo laisvų nuo padėklo deimanto tipo anglies plėvelių, užaugintų uždaro dreifo jonų šaltiniu, mikroformavimas. |
| Authors |
Meškinis, Šarūnas ; Tamulevičius, Sigitas ; Kopustinskas, Vitoldas ; Gudonytė, Angelė ; Grigaliūnas, Viktoras ; Jankauskas, Jurgis ; Gudaitis, Rimantas |
| Full Text |
|
| Is Part of |
Materials science = Medžiagotyra.. Kaunas : Technologija. 2009, vol. 15, no. 3, p. 201-206.. ISSN 1392-1320. eISSN 2029-7289 |
| Keywords [eng] |
diamond like carbon ; free standing films ; ion beam deposition ; surface micromashining |
| Abstract [eng] |
In the present study production of the freestanding film structures of diamond like carbon (DLC) and DLC containing SiOx (DLC:SiOx) are analysed. Role of the residual stress on the process of the micromachining of the “conventional” hydrogenated DLC and DLC:SiOx deposited by closed drift ion source has been investigated. Substantially reduced level of the internal stress (less than 0.5 GPa) as a result of the diamond like carbon film doping by SiOx was observed. DLC:SiOx free-standing film both cantilever and bridge-shaped with >1 μm thickness were successfully fabricated applying SiO2 as a sacrificial layer by combination of the lift-off technique and wet chemical etching. |
| Published |
Kaunas : Technologija |
| Type |
Journal article |
| Language |
English |
| Publication date |
2009 |
| CC license |
|
