| Title |
Diamond like carbon film as potential antireflective coating for silicon solar cells / |
| Another Title |
Antirefleksinės deimanto tipo anglies dangos silicio saulės elementams. |
| Authors |
Tamulevičienė, Asta ; Meškinis, Šarūnas ; Kopustinskas, Vitoldas ; Tamulevičius, Sigitas |
| Full Text |
|
| Is Part of |
Materials science = Medžiagotyra.. Kaunas : Technologija. 2010, vol. 16, no. 2, p. 103-107.. ISSN 1392-1320. eISSN 2029-7289 |
| Keywords [eng] |
DLC films ; antireflection properties ; solar cells |
| Abstract [eng] |
In the present study DLC films were deposited on crystalline silicon and quartz substrates from hydrocarbon gases (acetylene (C2H2) and methane (CH4)) by two methods: employing closed drift ion source and radio frequency plasma enhanced chemical vapour deposition (RF PECVD) technique. Optical properties of the formed films were analyzed employing UV/VIS/NIR spectroscopy. It was observed that in both deposition methods the lowest refractive index (at λ = 632.8 nm), which corresponds to the highest amount of bound hydrogen, is observed when energies per carbon atom are approximately 150 eV (300 eV ion beam energy in a closed drift ion source) and 160 eV (400 V bias voltage in RF PECVD). It is shown that depending on the deposition conditions the region of minimum reflection for the system DLC-crystalline silicon can be varied in a wide range. |
| Published |
Kaunas : Technologija |
| Type |
Journal article |
| Language |
English |
| Publication date |
2010 |
| CC license |
|
