Title Kinetics of growth and sorption properties of evaporable barium getter films /
Another Title Garinamo bario sugėriklio dangų augimo kinetika ir sorbcinės savybės.
Authors Giedraitis, Audrius ; Tamulevičius, Sigitas ; Gudaitis, Rimantas ; Andrulevičius, Mindaugas
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Is Part of Materials science = Medžiagotyra.. Kaunas : Technologija. 2010, vol. 16, no. 1, p. 12-23.. ISSN 1392-1320. eISSN 2029-7289
Keywords [eng] thin films ; surface properties ; barium getters ; gas sorption
Abstract [eng] The evaporable getters (gas absorbing materials) are widely used in industry in all applications where it is necessary to maintain required vacuum and to assure long lifetime of the operating systems through the sorption of undesired gases. One of the main factors influencing gas sorption characteristics of such getter films is physico-chemical nature of their surfaces. In this research the thin barium getter films have been prepared on glass substrates by thermal evaporation method. Adsorption properties of evaporated barium films formed in the presence of reactive (O2) and inert (Ar) gas atmospheres by means of in-situ and ex-situ measurement facilities were analysed. An overall view of the films in-situ and ex-situ results shows that the best sorption performance of the Ba films was obtained when the Ba film was porous (high vacuum cases) and short-time of evaporation was used. It was found that the sorption properties of particular barium film depend on duration of evaporation process that should be considered together with the residual gas pressure as a parameter influencing porosity of getter film. In conclusion it is evident that the process of barium evaporation must be short-term and forced with respect to temperature, in order to obtain good sorption and structural characteristics of the barium film.
Published Kaunas : Technologija
Type Journal article
Language English
Publication date 2010
CC license CC license description