| Title |
Scanning surface roughness of growing nanoisland thin films as a dependence on substrate temperature and deposition flux |
| Another Title |
Augančios nanosalelių dangos paviršiaus šiurkštumo priklausomybė nuo padėklo temperatūros ir dalelių srauto. |
| Authors |
Galdikas, Arvaidas ; Čerapaitė-Trušinskienė, Reda |
| Full Text |
|
| Is Part of |
Materials science = Medžiagotyra.. Kaunas : Technologija. 2009, vol. 15, no. 3, p. 191-195.. ISSN 1392-1320. eISSN 2029-7289 |
| Keywords [eng] |
rate equations ; kinetic modeling ; surface roughness ; nanoclusters ; island films ; surface diffusion |
| Abstract [eng] |
Experimentally observed non-monotonous dependencies of surface roughness of the growing thin films on substrate temperature and deposition flux of particles are analyzed by kinetic model based on rate equations. Obtained modeling results show good quantitative agreement with the experimental curves and explain so unusual phenomenon of surface roughness. It is shown that non-monotonous dependence of surface roughness on the temperature and deposition flux is determined by the size of islands and diffusivity of atoms on the surface. From the presented analysis follows that the formation mechanisms of non-monotonous dependencies of the surface roughness on the temperature and the deposition flux are different. These mechanisms are qualitatively analyzed in the present paper. |
| Published |
Kaunas : Technologija |
| Type |
Journal article |
| Language |
English |
| Publication date |
2009 |
| CC license |
|
