Title The surface roughness variation due to ion irradiation during thin film growth
Another Title Paviršiaus šiurkštumo kitimas dėl joninės apšvitos augant plonoms dangoms.
Authors Čerapaitė-Trušinskienė, Reda ; Galdikas, Arvaidas
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Is Part of Materials science = Medžiagotyra.. Kaunas : Technologija. 2009, vol. 15, no. 2, p. 139-141.. ISSN 1392-1320. eISSN 2029-7289
Keywords [eng] Volmer-Weber growth ; Surface diffusion ; Kinetic modeling ; Surface roughness
Abstract [eng] Experimentally observed non-monotonous dependence of thin films surface roughness on ion energy is analyzed by kinetic rate equation model. The modeling results show good quantitative agreement with the experiment and give possible physical reasons of behavior of the surface roughness. It is shown that non-monotonous dependence of surface roughness on ion energy is determined by the size of islands and diffusivity of atoms on the surface.
Published Kaunas : Technologija
Type Journal article
Language English
Publication date 2009
CC license CC license description