| Title |
Determination of thickness and density of ultra thin iron films by grazing angle incidence X-ray fluorescence |
| Another Title |
Labai plonų geležies dangų storio ir tankio matavimas registruojant slystančiais kampais sužadintą rentgeno spindulių fluorescenciją. |
| Authors |
Meškauskas, Algimantas |
| Full Text |
|
| Is Part of |
Materials science = Medžiagotyra.. Kaunas : Technologija. 2008, vol. 14, no. 1, p. 79-81.. ISSN 1392-1320. eISSN 2029-7289 |
| Keywords [eng] |
Ultra thin films ; Iron ; X-ray fluorescence ; Critical angle |
| Abstract [eng] |
An efficient and accurate method to characterize the physical thickness of ultra thin iron films is presented. Fe thin films were grown directly on n-Si(111) substrates by unbalanced magnetron system. X-ray fluorescence system was applied to measure coating thickness and perform material analysis. The composition and density of the films were characterized by measuring critical angle of reflection using X-ray fluorescence. It is shown that XRF analysis allows determination of thickness of samples potentially important for future technological interest. |
| Published |
Kaunas : Technologija |
| Type |
Journal article |
| Language |
English |
| Publication date |
2008 |
| CC license |
|
