| Title |
Optical transmittance method for in-situ analysis of adsorption phenomena from residual gases / |
| Another Title |
Optinio pralaidumo metodas liekamiesiems dujų adsorbcijos reiškiniams in-situ tirti. |
| Authors |
Giedraitis, Audrius ; Tamulevičius, Sigitas ; Šlapikas, Kęstutis ; Gudaitis, Rimantas |
| Full Text |
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| Is Part of |
Materials science = Medžiagotyra.. Kaunas : Technologija. 2007, vol. 13, no. 4, p. 351-354.. ISSN 1392-1320. eISSN 2029-7289 |
| Keywords [eng] |
optical transmission ; spectra analysis ; thermal evaporation ; adsorption process |
| Abstract [eng] |
In this paper, the feasibility of optical control of adsorption processes during thin film deposition, based on developed optical technique as well as experimental results are discussed. The kinetics of the optical absorbance of the growing film was registered in-situ measuring optical transmission of the film-substrate structure. These measurements were done in parallel to the ex-situ absorption (UV-VIS) and reflection spectra analysis. The main results were compared with the optical constants defined by the in-situ technique. Two different groups of samples that were prepared by thermal evaporation method on glass substrates were investigated. The first group included silver films (as a model material) and the second one – barium getter films. Such complex measurements enabled to follow adsorption process from the residual gases during the thermal evaporation as well to control adsorption process after the evaporation. It was shown that the presented method is very sensitive in small thickness region of deposited films (5 nm – 50 nm) and can be employed for evaluation of Ba getter efficiency. |
| Published |
Kaunas : Technologija |
| Type |
Journal article |
| Language |
English |
| Publication date |
2007 |
| CC license |
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