Title Deposition of amorphous Fe-Zr alloys by magnetron co-sputtering
Another Title Amorfinių Fe-Zr lydinių sudarymas vienalaikio magnetroninio nusodinimo metodu.
Authors Iljinas, Aleksandras ; Joneliūnas, Sigitas ; Milčius, Darius ; Dudonis, Julius
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Is Part of Materials science = Medžiagotyra.. Kaunas : Technologija. 2007, vol. 13, no. 2, p. 117-119.. ISSN 1392-1320. eISSN 2029-7289
Keywords [eng] Amorphous metals alloys ; Fe-Zr alloys ; FTS sputtering ; Magnetron co-sputering
Abstract [eng] The formation of amorphous structure of Fe thin films by magnetron co-sputtering deposition dependence on Zr impurity at room temperature was explored. X-ray diffraction methods were applied for studying a amorphous phase forming range vs composition of elements. Electrical properties were evaluated by four-probe and van der Pauw methods. The surface morphology was investigated by SEM. It was found that amorphous structure of Fe-Zr metals alloy forms when Zr concentration is 9 at.%. The resistivity of amorphous and nanocrystalline Fe1-xZrx thin films is 2 – 3 times bigger than polycrystalline and slightly depends on composition.
Published Kaunas : Technologija
Type Journal article
Language English
Publication date 2007
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