| Title |
Optical evaluation of geometrical parameters of micro-relief structures / |
| Another Title |
Mikroreljefinių struktūrų geometrinių parametrų vertinimas optiniais metodais. |
| Authors |
Tamulevičius, Tomas ; Tamulevičius, Sigitas ; Andrulevičius, Mindaugas ; Janušas, Giedrius ; Guobienė, Asta |
| Full Text |
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| Is Part of |
Materials science = Medžiagotyra.. Kaunas : Technologija. 2006, vol. 12, no. 4, p. 360-365.. ISSN 1392-1320 |
| Keywords [eng] |
diffraction gratings ; diffraction efficiency ; micro-fluidic device ; beam splitter |
| Abstract [eng] |
In the present research we have fabricated and investigated two kinds of surface relief gratings (phase diffraction gratings), formed with standard photolithography combined with the plasma-etching and reactive ion etching (RIE). Diffraction efficiency of diffraction gratings (originally produced in silicon and quartz glass substrates) was measured experimentally and estimated using linear dimensions of gratings defined by atomic force microscopy (AFM) and scanning electron microscopy (SEM). The main experimental results were compared with the computer simulations where the standard software (“PCGrate 2000MLT” and “GSolver”) were employed to calculate diffraction efficiency of different period of diffraction gratings for the different wavelengths of visible light. Comparing two evaluation methods: direct (scanning probe microscopy) and indirect (diffraction efficiency) we have demonstrated feasibility of optical methods in control of geometrical dimensions of gratings at the microscopic range. These methods enabled us to control and produce diffraction gratings for the different optical applications, like dispersive elements in spectroscopes, beam splitters or micro-fluidic devices. |
| Published |
Kaunas : Technologija |
| Type |
Journal article |
| Language |
English |
| Publication date |
2006 |
| CC license |
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