| Title |
Cathode positioning system for multiple beam electron gun / |
| Another Title |
Elektronų prožektoriaus katodų pozicionavimo sistema. |
| Authors |
Sinkevicius, V ; Virzonis, D ; Sumskiene, L ; Jukna, T |
| Full Text |
|
| Is Part of |
Elektronika ir elektrotechnika.. Kaunas : Technologija. 2006, Nr. 5, p. 21-24.. ISSN 1392-1215. eISSN 2029-5731 |
| Abstract [eng] |
The results of the investigations of the dual-stage cathode positioning system with more than 150 mm motion range and ±1 μm positioning accuracy are presented. The maximum allowable speed of the second stage actuator, securing the integrity of the cathode surface, of 10 mm/s was determined experimentally. The dynamic model of the cathode-probe system allowed to explore the dynamics of the interaction force and the dependencies of their character on the viscous friction. |
| Published |
Kaunas : Technologija |
| Type |
Journal article |
| Language |
English |
| Publication date |
2006 |
| CC license |
|
