| Abstract [eng] |
Ionic conductors are the main component in O2, COx, NOx gas sensors and solid oxide fuel cells. One of the most promising conductors at intermediate temperatures (600 °C) is SmxCe1-xO2-δ (SDC). The electrical properties of SDC depend on the Sm dopant concentration, the working temperature, the oxygen pressure, the migration path of oxygen ions, and the microstructure. Microstructural properties depend on the formation method and its parameters. So, the objective of the theses was to evaluate the influence of the specific surface area of powders, the deposition rate, the substrate temperature and the substrate type on the properties of Sm0.2Ce0.8O2-δ (SDC) thin films deposited by using the e-beam evaporation method. Therefore, SDC thin films were deposited on 50 °C – 600 °C temperature SiO2, Alloy600, Si (100) Al2O3 substrates by using powders of 6.2 m2/g, 11.3 m2/g, 38.8 m2/g and 201.3 m2/g specific surface area and 0.2 nm/s – 1.6 nm/s deposition rate. The reasons and processes determining the dependences of the microstructure, the surface morphology, the electrical and optical properties on the deposition parameters were analyzed and discussed after the investigation of thin films by means of X-ray diffractometer, scanning electron microscope, atomic force microscope, energy-dispersive X-ray spectroscope, X-ray photoelectron spectroscope, electrochemical impedance spectroscope, spectrophotometer. |
