| Title |
Holographic interferometry for visualization of vibrations of micromechanical structures / |
| Another Title |
Mikromechaninių struktūrų virpesių vizualizavimas holografinės interferometrijos būdu. |
| Authors |
Vasiliauskas, Raimundas ; Palevicius, Ramutis ; Ragulskis, Minvydas ; Palevicius, Arvydas ; Janusas, Giedrius |
| Full Text |
|
| Is Part of |
Informacinės technologijos ir valdymas = Information technology and control.. Kaunas : Technologija. 2004, Nr. 3, p. 41-45.. ISSN 1392-124X. eISSN 2335-884X |
| Keywords [eng] |
digital holography ; optical holography ; micromechanical systems |
| Abstract [eng] |
The optical holography and digital holography methods for visualization of modes of vibrations of micromechanical systems are described. The Denisiuk holography approach and optoelectronic techniques for investigation MEMS with sub-micrometer accuracy, shape and changes in states of deformation of MEMS structures are proposed. Examples of holographic visualization of the vibration of links of MEMS are presented. |
| Published |
Kaunas : Technologija |
| Type |
Journal article |
| Language |
English |
| Publication date |
2004 |
| CC license |
|
