| Title |
Numerical analysis of microresonator developed on the basis of PZT nanocomposite |
| Authors |
Janušas, Giedrius ; Čekas, Elingas ; Pilkauskas, Kęstutis ; Mullaveettil, Farusil Najeeb |
| DOI |
10.5755/j01.mech.23.5.16308 |
| Full Text |
|
| Is Part of |
Mechanika.. Kaunas : KTU. 2017, vol. 23, no. 5, p. 769-773.. ISSN 1392-1207. eISSN 2029-6983 |
| Keywords [eng] |
microresonator ; piezoelectric material ; periodi-cal microstructure ; diffraction efficiency |
| Abstract [eng] |
Microresonators are fundamental components integrated in hosts of MEMS applications: safety and stability systems, biometric sensors, switches, mechanical filters, micromirror devices, material characterization, gyroscopes, etc. Microresonator is a device where a piezoelectric coating plays most important role in the design and operation of the element itself. Also piezoelectric layer allows to create a novel microresonator with controllable parameters, which could assure much higher functionality of microelectromechanical systems. Forming periodical microstructure in the nanocomposite material allows to involve two measurement types for better accuracy: electrical and optical. Finite element model in Comsol Multiphysics environment was created. Numerical analysis of microresonator developed on the basis of PZT nanocomposite is presented. Electrical potential of 2.2 V for the corresponding 10 V input was recorded. Dependency of diffraction efficiency and diffraction angle to period changes were investigated. |
| Published |
Kaunas : KTU |
| Type |
Journal article |
| Language |
English |
| Publication date |
2017 |
| CC license |
|
