Title The effect of chromium on the microstructure and transparency of diamond-like carbon films
Authors Dovydaitis, Vilius ; Milieška, Mindaugas ; Chimborazo, Johnny ; Gnecco, Enrico ; Marcinauskas, Liutauras
DOI 10.3390/pr13041098
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Is Part of Processes.. Basel : MDPI. 2025, vol. 13, iss. 4, art. no. 1098, p. 1-11.. ISSN 2227-9717
Keywords [eng] chromium ; diamond-like carbon ; Raman spectroscopy ; magnetron sputtering ; oxygen
Abstract [eng] Cr-doped diamond-like carbon (DLC) films were formed on silicon and glass substrates by magnetron sputtering (MS). The surface morphology, elemental composition, bonding structure, and transparency of the as-deposited films were analyzed by atomic force microscopy (AFM), the energy-dispersive X-ray spectroscopy (EDS), multiwavelength micro-Raman spectrometer, and UV-VIS-NIR spectrophotometer. The study revealed that the oxygen concentration in the Cr-DLC films increased as the Cr content increased. The surface roughness of the films was slightly reduced when the Cr content was ~9.2 at.%, and further increase in the Cr content up to 13.1 at.% stimulated the growth of the highest-roughness Cr-DLC films. The micro-Raman analysis showed that the G peak position shifted to a higher wavenumber, and the sp² bond fraction increased as the Cr concentration in the DLC films rose. The optical transmittance of the Cr-DLC films was reduced by up to 30% compared to DLC coatings due to the increased graphitization process caused by chromium addition.
Published Basel : MDPI
Type Journal article
Language English
Publication date 2025
CC license CC license description