Title Vario oksido plonų plėvelių formavimas /
Translation of Title Copper Oxide Film Formation.
Authors Balandaitė, Vilma
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Pages 50
Keywords [eng] copper oxide ; magnetron deposition ; film transparency ; sheet resistance
Abstract [eng] Copper oxides are copper compounds with oxygen. Copper oxide film has dielectric properties, ensuring unique possibilities to apply them as the active layers in solar elements, sensors and other devices. The chemical system Cu-O has multiple forms of oxide, stable in certain temperature intervals. The composition of these oxides varies from Cu2O to CuO, however, only Cu2O film is suitable for solar energy applications. Copper oxide is also suitable for manufacturing of photo-electrochemical elements which use solar energy to separate water into hydrogen and oxygen. Copper oxide coatings are used as one of the cheapest materials that can be applied in the production of solar elements. In this paper, a literature analysis has been carried out on copper oxide properties and deposition methods. During experiments, copper oxide thin film was formed in the reactive magnetron deposition system and annealed in a diffusion furnace. Measurements of the electrical and optical properties of the formed films were carried out, and the influence of technological parameters on these characteristics was examined.
Dissertation Institution Kauno technologijos universitetas.
Type Master thesis
Language Lithuanian
Publication date 2017