Title Surface morphology, cohesive and adhesive properties of physical vapor deposited chromium and chromium composite thin films /
Translation of Title Fizikiniais metodais nusodintų plonų chromo ir chromo kompozicinių plėvelių paviršiaus morfologija, kohezinės ir adhezinės savybės.
Authors Lazauskas, Algirdas
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Pages 128
Keywords [eng] thin films ; chromium ; composites ; diamond-like carbon
Abstract [eng] Chromium thin film on glass substrate is the backbone of lithographic mask production as well as in the manufacturing of precision scale gratings and reticles. The lithographic masks, precision scale gratings and reticles, which are widely used in metrology instruments, motion systems and high precision machining tools ranging from digital calipers to coordinate measuring machines, typically consist of the patterned chromium film on the top of the glass substrate. In proportion to the development of such systems and devices, as a rule, high quality is requested altering the requirements for chromium thin films. This work aims to develop thin films with low surface roughness and improved scratch/wear resistance as compared to conventional chromium thin films. It covers – the systematic study of substrate surface preparation methods for improved chromium thin film adhesion to substrate; properties of chromium thin films deposited on glass using different physical vapor deposition techniques; investigation of diamond-like carbon (DLC) films and DLC-polymer composites on chromium thin films; and development of novel chromium composite films. The systematic study showed that soda–lime–silica float glass substrate surface activation and contamination removal by O2 plasma treatment process and wet chemical processing with NH4OH and H2O2 in H2O solution can effectively improve chromium thin film adhesive bonding to the substrate. It was determined that two-step thermal deposition of chromium thin films on glass substrates followed by O2 plasma treatment after the first deposition improved chromium composite film adhesion to substrate and film cohesion as compared with conventional deposition process.
Type Doctoral thesis
Language English
Publication date 2014