| Title |
Influence of PZT coating thickness and electrical pole alignment on microresonator properties / |
| Authors |
Janusas, Giedrius ; Ponelyte, Sigita ; Brunius, Alfredas ; Guobiene, Asta ; Vilkauskas, Andrius ; Palevicius, Arvydas |
| DOI |
10.3390/s16111893 |
| Full Text |
|
| Is Part of |
Sensors.. Basel : MDPI. 2016, vol. 16, iss. 11, art. no. 1893, p. 1-9.. ISSN 1424-8220 |
| Keywords [eng] |
microresonator ; PZT ; poling ; coating |
| Abstract [eng] |
With increasing technical requirements in the design of microresonators, the development of new techniques for lightweight, simple, and inexpensive components becomes relevant. Lead zirconate titanate (PZT) is a powerful tool in the formation of these components, allowing a self-actuation or self-sensing capability. Different fabrication methods lead to the variation of the properties of the device itself. This research paper covers the fabrication of a novel PZT film and the investigations of its chemical, surface, and dynamic properties when film thickness is varied. A screen-printing technique was used for the formation of smooth films of 60 µm, 68 µm, and 25 µm thickness. A custom-made poling technique was applied to enhance the piezoelectric properties of the designed films. However, poling did not change any compositional or surface characteristics of the films; changes were only seen in the electrical ones. The results showed that a thinner poled PZT film having a chemical composition with the highest amount of copper and zirconium led to better electrical characteristics (generated voltage of 3.5 mV). |
| Published |
Basel : MDPI |
| Type |
Journal article |
| Language |
English |
| Publication date |
2016 |
| CC license |
|
