| Title |
Study of the magnetic field of the ferromagnetic film thickness sensor based on the hall effect / |
| Authors |
Balitskyi, Oleksii ; Topalov, Andrii ; Halapsis, Denys ; Khoda, Valentyn |
| Full Text |
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| Is Part of |
World of scientific research = Світ наукових досліджень: 2. Information systems and technologies.. Тернопіль : ГО “Наукова спільнота”. 2023, iss. 25, p. 1-3.. ISSN 2786-6823 |
| Abstract [eng] |
Coating methods are actively developing and are widely used to increase the reliability and durability of machine and mechanism parts by forming a protective surface metal layer with enhanced functional properties. However, there are some technical challenges when it comes to the process of measuring coatings. To date, various scientific associations have created a large number of inductive sensors that can be used to measure coating thicknesses both in laboratories and factory conditions. All types of sensors depend on the methods on which they are based. It is important to maintain control over the sputtering process, in particular the thickness of the ferromagnetic material layer, in real-time. For this, a measuring device based on the Hall effect to measure the metal layer would be sufficient. Many researchers [1-5] put forward requirements for such a sensor. It is expected to have high reliability, allow for further improvements in accuracy, and be compatible with computer hardware during automated measurements. This type of equipment uses a constant magnetic field, and the measuring element is the Hall sensor that responds to the strength of the magnetic field. Various improvements are being developed to methods of measuring the thickness of sprayed foil. In particular, the computational converter can be enhanced in the following characteristic ways: extension of the measurement range, increase in precision of calculation and measurement, providing higher sensitivity of the device. These requirements can be met, by relying on high-quality mathematical and computer models of the device. The measuring system of the electromagnetic transducer consists of an inductor with a high Q-factor and a measuring plate based on a Hall sensor. This sensor measures film thickness by the witness method. [...]. |
| Published |
Тернопіль : ГО “Наукова спільнота” |
| Type |
Conference paper |
| Language |
English |
| Publication date |
2023 |
| CC license |
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