| Title |
Design of zeolitic imidazolate framework-8-functionalized capacitive micromachined ultrasound transducer gravimetric sensors for gas and hydrocarbon vapor detection / |
| Authors |
Dzikaras, Mindaugas ; Barauskas, Dovydas ; Pelenis, Donatas ; Vanagas, Gailius ; Mikolajūnas, Marius ; Shi, Jingming ; Baltrusaitis, Jonas ; Viržonis, Darius |
| DOI |
10.3390/s23218827 |
| Full Text |
|
| Is Part of |
Sensors.. Basel : MDPI. 2023, vol. 23, iss. 21, art. no. 8827, p. 1-19.. ISSN 1424-8220 |
| Keywords [eng] |
gravimetric ; gas sensor ; ZIF-8 ; CMUT ; hydrocarbons |
| Abstract [eng] |
A capacitive micromachined ultrasound transducer (CMUT) was engineered and functionalized with zeolitic imidazolate framework-8 (ZIF-8) dispersed in a photoresist AZ1512HS (AZ) matrix to function as a gravimetric gas sensor. The sensor response was recorded in the presence of nitrogen, argon, carbon dioxide, and methane gases as well as water, acetylene, a propane/butane mixture, n-hexane, gasoline, and diesel vapors. The photoresist matrix alone was found to have a negligible response to all the gases and vapors, except for water vapor. No visible difference in sensor response was detected when switching from nitrogen to methane gas. However, a strong shift in the sensor resonance frequency was observed when exposed to higher hydrocarbons, ranging from 1 kHz for acetylene to 7.5 kHz for gasoline. Even longer-chain hydrocarbons, specifically kerosene and more so diesel, had a significantly reduced sensor frequency shift compared with gasoline. Sensors functionalized with a thin film of AZ+ZIF-8 demonstrated higher sensitivity in their response to a hydrocarbon molecular mass than without functionalization. |
| Published |
Basel : MDPI |
| Type |
Journal article |
| Language |
English |
| Publication date |
2023 |
| CC license |
|
