| Title |
Multitarget reactive magnetron sputtering towards the production of strontium molybdate thin films / |
| Authors |
Andrulevičius, Mindaugas ; Artiukh, Evgenii ; Suchaneck, Gunnar ; Wang, Sitao ; Sobolev, Nikolai A ; Gerlach, Gerald ; Tamulevičienė, Asta ; Abakevičienė, Brigita ; Tamulevičius, Sigitas |
| DOI |
10.15388/IOR2023 |
| ISBN |
9786090708835 |
| Full Text |
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| Is Part of |
Open readings 2023: 66th international conference for students of physics and natural sciences, April 18-21, 2023, Vilnius, Lithuania: annual abstract book / editors: M. Keršys, Š. Mickus.. Vilnius : Vilnius University press, 2023. p. 273.. ISBN 9786090708835 |
| Abstract [eng] |
X-ray photoelectron spectroscopy was used to study the direct synthesis of strontium and molybdenum oxide thin films deposited by multitarget reactive magnetron sputtering (MT-RMS). Sr and Mo targets with a purity of 99.9% and 99.5%, respectively, were cosputtered in an argon–oxygen gas mixture. The chamber was provided with an oxygen background flow plus an additional controlled oxygen supply to each of the targets. We demonstrate that variation in the power applied to the Mo target during MT-RMS enables the production of strontium and molybdenum oxide films with variable concentrations of Mo atoms. Both molybdenum and strontium were found in the oxidized state, and no metallic peaks were detected. The deconvoluted high-resolution XPS spectra of molybdenum revealed the presence of several Mo 3D peaks, which indicates molybdenum bonds in a lower valence state. Contrary to the Mo spectra, the high-resolution strontium Sr 3D spectra for the same samples were very similar, and no additional peaks were detected. Conclusions: (1) Survey XPS spectra showed all elements present in the deposited films and a small amount of atmospheric contaminants; in addition, the same elements were detected in EDX, Raman spectra, and XRD as well. (2) Both Mo and Sr were found to be in the oxidized state, and no metallic peaks were detected. The deconvoluted high-resolution XPS spectra of molybdenum revealed the presence of several Mo 3D peaks, which indicated molybdenum bonds in a lower valence state. Contrary to the molybdenum spectra, the high-resolution strontium Sr 3D spectra for the same samples were very similar, and no additional peaks were detected. (3) The oxygen spectra also showed a similar structure consisting mostly of a peak at approximately 530.5 eV, which represents oxygen bound to molybdenum (530.5 eV) or oxygen bound to strontium (530.4 eV). A small amount of typical atmospheric contaminants (C-O and H-O bonds) was also detected. (4) Raman Scattering Spectroscopy revealed the presence of the MoO3 phase in one of the deposited films. (5) The XRD patterns showed the presence of a crystalline MoO3 phase for the same sample, while the other samples were found in an amorphous state. (6) The deposition of SrO-MoO3 oxide films with variable concentrations of Mo at-oms was achieved using a variation in power applied to the Mo target during MT-RMS. The obtained SrO-MoO3 oxide films can be used as a starting material to produce SMO films via subsequent thermal treatment. |
| Published |
Vilnius : Vilnius University press, 2023 |
| Type |
Conference paper |
| Language |
English |
| Publication date |
2023 |
| CC license |
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