| Title |
Muaro ir supergardelių formavimas naudojant holografinę litografiją / |
| Translation of Title |
Moiré and superlattice formation using holographic lithography. |
| Authors |
Klyvis, Gvidas |
| Full Text |
|
| Pages |
48 |
| Keywords [eng] |
Moiré ; superlattice ; holographic lithography |
| Abstract [eng] |
Optical lithography allows to pattern flat surfaces using masks and UV light, but the resolution is limited by the quality of the mask and diffraction of light. One of the ways to pattern sub-wavelength structures without physical masks is holographic lithography. Instead of masks, light fringes are formed by the interference of laser beams. Two beam interference results in a simple sinusoidal pattern, however by adding several of such patterns on top of each other, more complex periodic structures such as Moiré patterns and superlattices can be formed, which can have interesting properties. Lloyd’s mirror interferometer was used to produce periodic structures carrying both nanometer and millimeter periodicities on the centimeter scale areas. |
| Dissertation Institution |
Kauno technologijos universitetas. |
| Type |
Master thesis |
| Language |
English |
| Publication date |
2022 |
