| Title |
Structural, morphologic, and ferroelectric properties of PZT films deposited through layer-by-layer reactive DC magnetron sputtering / |
| Authors |
Beklešovas, Benas ; Iljinas, Aleksandras ; Stankus, Vytautas ; Čyvienė, Jurgita ; Andrulevičius, Mindaugas ; Ivanov, Maksim ; Banys, Jūras |
| DOI |
10.3390/coatings12060717 |
| Full Text |
|
| Is Part of |
Coatings.. Basel : MDPI. 2022, vol. 12, iss. 6, art. no. 717, p. 1-10.. ISSN 2079-6412 |
| Keywords [eng] |
ferroelectric ; lead-zirconate titanate ; PZT ; thin films ; magnetron sputtering |
| Abstract [eng] |
Lead zirconate titanate (PZT) is a widely used material with applications ranging from piezoelectric sensors to developing non-volatile memory devices. Pb(ZrxTi1−x)O3 films were deposited by DC reactive magnetron sputtering at a temperature range of (500–600) °C. X-ray diffraction (XRD) indicated the perovskite phase formation in samples synthesized at 550 °C, which agrees with Raman data analysis. Scanning electron microscopy (SEM) measurements supplemented XRD data and showed the formation of dense PZT microstructures. Further X-ray photoelectron spectroscopy (XPS) analysis confirmed that the Zr/Ti ratio corresponds to the Pb(Zr0.58Ti0.42)O3 content. Dielectric measurement of the same sample indicated dielectric permittivity to be around 150 at room temperature, possibly due to the defects in the structure. P-E measurements show ferroelectric behavior at a temperature range of (50–180) °C. It was found that the remnant polarization increased with temperature, and at the same time, coercive field values decreased. Such behavior can be attributed to energetically deep defects. |
| Published |
Basel : MDPI |
| Type |
Journal article |
| Language |
English |
| Publication date |
2022 |
| CC license |
|
