Title Structural and chemical peculiarities of nitrogen-doped graphene grown using direct microwave plasma-enhanced chemical vapor deposition /
Authors Meškinis, Šarūnas ; Gudaitis, Rimantas ; Andrulevičius, Mindaugas ; Lazauskas, Algirdas
DOI 10.3390/coatings12050572
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Is Part of Coatings.. Basel : MDPI. 2022, vol. 12, iss. 5, art. no. 572, p. 1-9.. ISSN 2079-6412
Keywords [eng] microwave ; plasma-enhanced ; CVD ; nitrogen-doped ; graphene ; catalyst-less ; transfer-less ; synthesis
Abstract [eng] Chemical vapor deposition (CVD) is an attractive technique which allows graphene with simultaneous heteroatom doping to be synthesized. In most cases, graphene is grown on a catalyst, followed by the subsequent transfer process. The latter is responsible for the degradation of the carrier mobility and conductivity of graphene due to the presence of the absorbants and transfer-related defects. Here, we report the catalyst-less and transfer-less synthesis of graphene with simultaneous nitrogen doping in a single step at a reduced temperature (700 °C) via the use of direct microwave plasma-enhanced CVD. By varying nitrogen flow rate, we explored the resultant structural and chemical properties of nitrogen-doped graphene. Atomic force microscopy revealed a more distorted growth process of graphene structure with the introduction of nitrogen gas—the root mean square roughness increased from 0.49 ± 0.2 nm to 2.32 ± 0.2 nm. Raman spectroscopy indicated that nitrogen-doped, multilayer graphene structures were produced using this method. X-ray photoelectron spectroscopy showed the incorporation of pure pyridinic N dopants into the graphene structure with a nitrogen concentration up to 2.08 at.%.
Published Basel : MDPI
Type Journal article
Language English
Publication date 2022
CC license CC license description