Abstract [eng] |
In this work, the formation of carbon films on substrates with low temperatures (less than 250 °C) has been analysed. Films with silver, copper, gold, and platinum impurities have been analysed there. The influence of nanosecond laser irradiation on a-C:H(Au)/Si, a-C:H(Au)/SiO2/Si films and picosecond laser irradiation using the first, second and third harmonics (1064 nm, 532 nm, 355 nm) change DLC film properties, which have been studied there as well. |