| Title |
Deimanto tipo anglies plėvelių ir jų nanokompozitų auginimas ir pjezovaržinių savybių tyrimas / |
| Translation of Title |
Diamond like carbon films and their nanocomposites: deposition and investigation of the piezoresistive properties. |
| Authors |
Vasiliauskas, Andrius |
| Full Text |
|
| Pages |
93 |
| Keywords [eng] |
diamond like carbon ; piezoresistive effect ; magnetron sputtering |
| Abstract [eng] |
The aim of the work is to deposit piezoresistive diamond like carbon and metal nanocomposite films and to study dependence of the structure, composition and electrical properties of these films on deposition conditions and possible correlation with piezoresistive properties. Properties of DLC can be controlled by introducing metal in the film. Using magnetron sputtering DLC with metal inclusions can be deposited. This method is relevant because magnetron sputtering is popular in industry. |
| Dissertation Institution |
Kauno technologijos universitetas. |
| Type |
Doctoral thesis |
| Language |
Lithuanian |
| Publication date |
2015 |
